ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,492,464, issued on Dec. 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Protective metal oxy-fluoride coatings" was invented by David Fenwick (Los Altos, Calif.), Chengtsin Lee (Union City, Calif.), Jennifer Y. Sun (Mountain View, Calif.) and Yikai Chen (Santa Clara, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An article has a body having a protective coating. The protective coating is a thin film that includes a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MxOyFz, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective co...