US Patent Issued to APPLIED MATERIALS on Dec. 9 for "Movable central reflectors of semiconductor processing equipment, and related systems and methods" (American, Indian Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,492,487, issued on Dec. 9, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Movable central reflectors of semiconductor processing equipment, and related systems and methods" was invented by Ala Moradian (Sunnyvale, Calif.), Vishwas Kumar Pandey (Madhya Pradesh, India), Lori D. Washington (San Jose, Calif.) and Saurabh Chopra (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to a radiation reflector assembly for use with a semiconductor processing chamber and a substrate processing system having the radiation reflector assembly. The radiation reflector assembly includes a shell body that incl...