ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,388, issued on Dec. 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Methods and apparatus for measuring temperature using centerfind systems" was invented by Paul Zachary Wirth (Kalispell, Mont.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed are systems and methods for measuring the temperature change of one or more substrates within a semiconductor processing system. The temperature change information may be used to optimize throughput of substrates within the system and to troubleshoot quality issues that may be impacted by temperature."
The patent was filed on Jan. 20, 2022, under Application No. 17/580,287.
*For furt...