US Patent Issued to Applied Materials on Dec. 9 for "Increasing the gas efficiency for an electrostatic chuck" (California Inventor)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,493,303, issued on Dec. 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Increasing the gas efficiency for an electrostatic chuck" was invented by Vijay D. Parkhe (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas is received through an inlet. A portion of the gas is supplied to an electrostatic chuck. A portion of the gas is re-circulated through a compressor. A pressure of the second portion of the gas is increased. The second portion of the gas is stored in a gas storage."

The patent was filed on July 11, 2023, under Application No. 18/220,705.

*For further information, including images, charts and tables, please...