US Patent Issued to Applied Materials on Dec. 9 for "Fast switching gas circuits and processing chambers, and related methods and apparatus, for gas stabilization" (California, Texas Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,493,307, issued on Dec. 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Fast switching gas circuits and processing chambers, and related methods and apparatus, for gas stabilization" was invented by Enle Choo (Saratoga, Calif.), Martin Truemper (Austin, Texas), Shu-Kwan Lau (Sunnyvale, Calif.) and Jason Jewell (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments generally relate to gas circuits for distributing gases for processing of substrates applicable for semiconductor manufacturing. In one or more embodiments, flow controllers of a gas circuit are used to stabilize, distribute, and switch gases for proce...