US Patent Issued to Applied Materials on Dec. 9 for "Apparatus for controlling lift pin movement" (Indian, American Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,395, issued on Dec. 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus for controlling lift pin movement" was invented by Anubhav Srivastava (Bangalore, India), Bhaskar Prasad (Jamshedpur, India), Kirankumar Neelasandra Savandaiah (Bangalore, India), Thomas Brezoczky (Los Gatos, Calif.) and Nitin Bharadwaj Satyavolu (Kakinada, India).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure generally relate to lift pins and to apparatus for controlling lift pin movement. In an embodiment, an apparatus for positioning a substrate in a chamber is provided. The apparatus includes a chamber component, a ...