US Patent Issued to Applied Materials on Dec. 9 for "Air shrouds with integrated heat exchanger" (Indian, American Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,492,867, issued on Dec. 9, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Air shrouds with integrated heat exchanger" was invented by Abraham Palaty (Thrissur, India), Vinodh Ramachandran (Bangalore, India), Shu-Kwan Lau (Sunnyvale, Calif.), Shainish Nellikka (Bangalore, India), Raja Murali Dhamodharan (Madurai, India) and Danny D. Wang (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through...