ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,362, issued on Dec. 30, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Susceptor improvement" was invented by Matthew Gabriel Goodman (Phoenix), John Tolle (Gilbert, Ariz.), Shawn Thomas (Chesterfield, Mo.), Lori D. Washington (San Jose, Calif.), Xinning Luan (Tempe, Ariz.) and Zhepeng Cong (San Jose, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A susceptor for processing a substrate is provided including a base and a coating formed over the base. The base includes an outer rim having an inner edge, an outer edge, and a top connecting the inner edge to the outer edge; and an inner dish disposed inside the outer rim and coupl...