US Patent Issued to APPLIED MATERIALS on Dec. 16 for "Modular flow chamber kits, processing chambers, and related apparatus and methods applicable for semiconductor manufacturing" (California Inventor)

ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,497,693, issued on Dec. 16, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Modular flow chamber kits, processing chambers, and related apparatus and methods applicable for semiconductor manufacturing" was invented by Zhepeng Cong (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Embodiments of the present disclosure relate to modular flow chamber kits, processing chambers, and related apparatus and methods applicable for semiconductor manufacturing. In one or more embodiments, a processing chamber includes a chamber body at least partially defining a processing volume. The chamber body includes a plurality of inject passag...