ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,497,697, issued on Dec. 16, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Layer with discrete islands formed on a substrate support" was invented by Zhepeng Cong (San Jose, Calif.), Nyi Oo Myo (San Jose, Calif.), Hui Chen (Tempe, Ariz.), Huy D. Nguyen (San Ramon, Calif.), Shaofeng Chen (Austin, Texas), Xinning Luan (Tempe, Ariz.), Kirk Allen Fisher (Tempe, Ariz.), Aimee S. Erhardt (Tempe, Ariz.), Shawn Joseph Bonham (Mesa, Ariz.), Philip Michael Amos (Apache Junction, Ariz.) and James M. Amos (Apache Junction, Ariz.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate support assembly and processing chamber having the same are dis...