US Patent Issued to Applied Materials on Aug. 5 for "Systems and methods of seasoning electrostatic chucks with dielectric seasoning films" (California, Oregon Inventors)

ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,381,106, issued on Aug. 5, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Systems and methods of seasoning electrostatic chucks with dielectric seasoning films" was invented by Akhil Singhal (Portland, Ore.), Allison Yau (Cupertino, Calif.), Zeqiong Zhao (Santa Clara, Calif.), Sang-Jin Kim (San Jose, Calif.), Zhijun Jiang (San Jose, Calif.), Deenesh Padhi (Sunnyvale, Calif.) and Ganesh Balasubramanian (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Semiconductor processing systems and method are described that may include flowing deposition precursors into a substrate processing region of a semiconductor processing chamber...