US Patent Issued to APPLIED MATERIALS on Aug. 5 for "Hermetic tubular linear motor based wafer lift actuator" (California, Texas Inventors)

ALEXANDRIA, Va., Aug. 6 -- United States Patent no. 12,381,109, issued on Aug. 5, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).

"Hermetic tubular linear motor based wafer lift actuator" was invented by Alexander Sulyman (San Francisco), Phillip Alfred Criminale (Liberty Hill, Texas) and Cory Bowdach (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "Methods and system for lifting a substrate are provided. In some embodiments a system includes a processing chamber having a chamber body defining an interior space; and a linear motor comprising: a housing disposed outside of the interior space and sealed to the chamber body, the housing having a cavity in fluid communication with t...