US Patent Issued to Applied Materials on Aug. 26 for "Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning" (California Inventors)

ALEXANDRIA, Va., Aug. 26 -- United States Patent no. 12,400,881, issued on Aug. 26, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Apparatus and method of substrate edge cleaning and substrate carrier head gap cleaning" was invented by Wei Lu (Fremont, Calif.), Jimin Zhang (San Jose, Calif.), Jianshe Tang (San Jose, Calif.) and Brian J. Brown (Palo Alto, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure relates to load cups that include an annular substrate station configured to receive a substrate. The annular substrate station surrounds a nebulizer located within the load cup. The nebulizer includes a set of energized fluid nozzles disposed on an upper surface of ...