US Patent Issued to Applied Materials on Aug. 19 for "Plasma source with floating electrodes" (California, Montana Inventors)

ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,604, issued on Aug. 19, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Plasma source with floating electrodes" was invented by Quoc Truong (San Ramon, Calif.), Dmitry A. Dzilno (Sunnyvale, Calif.) and Robert B. Moore (Bigfork, Mont.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma source assembly for use with a substrate processing chamber is described. The assembly includes a spring which is disposed between electrodes and a dielectric ring."

The patent was filed on Sept. 11, 2020, under Application No. 17/017,952.

*For further information, including images, charts and tables, please visit: http://patft.uspto.gov/netacgi/np...