ALEXANDRIA, Va., Aug. 20 -- United States Patent no. 12,394,646, issued on Aug. 19, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"In-chamber low-profile sensor assembly" was invented by Chuang-Chia Lin (San Ramon, Calif.) and Wenwei Qiao (Gilroy, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A sensor system includes a processing chamber and a sensor assembly disposed within the processing chamber. The sensor assembly includes a substrate and a plurality of sensors including at least one of pressure sensors or flow sensors disposed across a surface of the substrate. Each respective sensor is adapted to measure a respective pressure or a respective flow of an environment proximate the ...