US Patent Issued to Applied Materials on Aug. 12 for "Shield ring mounting using compliant hardware" (Massachusetts, New Hampshire Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,912, issued on Aug. 12, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Shield ring mounting using compliant hardware" was invented by Jordan B. Tye (Arlington, Mass.), James A. Pixley (Dover, N.H.) and John R. Fairhurst (Plaistow, N.H.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system for mounting the shield ring to the pedestal in a plasma chamber is disclosed. The mounting system includes compliant hardware. A fastener with a compliant component, such as an O-ring, is first secured to the pedestal. The shield ring has a top surface, a bottom surface and walls extending downward from the inner and outer diameter of the shield ...