ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,387,978, issued on Aug. 12, was assigned to APPLIED MATERIALS Inc. (Santa Clara, Calif.).
"Ru liner above a barrier layer" was invented by Zhaoxuan Wang (Sunnyvale, Calif.), Jianxin Lei (Fremont, Calif.), Wenting Hou (San Jose, Calif.), Sung-Kwan Kang (San Jose, Calif.) and Anand Nilakantan Iyer (Fremont, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method to produce a layered substrate, which includes the steps of depositing a diffusion barrier layer on the substrate; depositing an underlayer comprising a Group 6 metal on the barrier layer; and depositing a ruthenium layer comprising ruthenium on the underlayer, to produce the layered substr...