US Patent Issued to Applied Materials on Aug. 12 for "Hyper-spectral multi-spot optical reflectometer" (California Inventor)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,385,778, issued on Aug. 12, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Hyper-spectral multi-spot optical reflectometer" was invented by Pengyu Han (Santa Clara, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An optical reflectometry system, including a processing chamber, a substrate support wherein the substrate support is configured to accept a substrate, a light source configured to transmit an incident light beam, an optical fiber bundle coupled to the light source and optically coupled to a lens assembly, wherein the lens assembly optically coupled to at least a first optical fiber, and configured to transmit to, and rece...