US Patent Issued to Applied Materials on Aug. 12 for "Endpoint detection system for enhanced spectral data collection" (California Inventors)

ALEXANDRIA, Va., Aug. 12 -- United States Patent no. 12,385,803, issued on Aug. 12, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Endpoint detection system for enhanced spectral data collection" was invented by Pengyu Han (San Jose, Calif.) and Lei Lian (Fremont, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "An endpoint detection system for enhanced spectral data collection is provided. An optical bundle is coupled to a light source. The optical bundle includes an emitting optical fiber and a receiving optical fiber disposed at a pairing angle relative to the emitting optical fiber. The optical bundle is coupled to a collimator assembly that receives a light beam of incident light fr...