US Patent Issued to Applied Materials on April 8 for "Wideband variable impedance load for high volume manufacturing qualification and on-site diagnostics" (California Inventors)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,272,524, issued on April 8, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Wideband variable impedance load for high volume manufacturing qualification and on-site diagnostics" was invented by Yue Guo (Redwood City, Calif.), Kartik Ramaswamy (San Jose, Calif.), Jie Yu (Santa Clara, Calif.) and Yang Yang (San Diego).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wideband variable impedance load for high volume manufacturing qualification and diagnostic testing of a radio frequency power source, an impedance matching network and RF sensors for generating plasma in a semiconductor plasma chamber for semiconductor fabrication processes. The...