US Patent Issued to Applied Materials on April 29 for "Evaporation apparatus, vapor deposition apparatus, and evaporation method" (German Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,286,703, issued on April 29, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Evaporation apparatus, vapor deposition apparatus, and evaporation method" was invented by Wolfgang Buschbeck (Hanau, Germany) and Stefan Bangert (Steinau, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "An evaporation apparatus is described, particularly for evaporating a reactive material such as lithium. The evaporation apparatus includes an evaporation crucible for evaporating a liquid material, a material conduit for supplying the liquid material to the evaporation crucible, and a valve configured to close the material conduit by solidifying a part of ...