US Patent Issued to Applied Materials on April 29 for "Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide" (American, Japanese Inventors)

ALEXANDRIA, Va., June 9 -- United States Patent no. 12,288,675, issued on April 29, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Cylindrical cavity with impedance shifting by irises in a power-supplying waveguide" was invented by Satoru Kobayashi (Santa Clara, Calif.), Hideo Sugai (Kasugai, Japan), Toan Tran (San Jose, Calif.), Soonam Park (Sunnyvale, Calif.) and Dmitry Lubomirsky (Cupertino, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A plasma reactor has a cylindrical microwave cavity overlying a workpiece processing chamber, a microwave source having a pair of microwave source outputs, and a pair of respective waveguides. The cavity has first and second input ports in a sidewal...