ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,503, issued on April 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.).
"Substrate measurement subsystem" was invented by Upendra V. Ummethala (Cupertino, Calif.), Blake Erickson (Gilroy, Calif.), Prashanth Kumar (Union City, Calif.), Michael Kutney (Santa Clara, Calif.), Steven Trey Tindel (Austin, Texas) and Zhaozhao Zhu (Milpitas, Calif.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A method for a substrate measurement subsystem is provided. An indication is received that a substrate being processed at a manufacturing system has been loaded into a substrate measurement subsystem. First positional data of the substrate within the su...