US Patent Issued to Applied Materials on April 22 for "Methods and systems for temperature control for a substrate" (California, Montana Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,500, issued on April 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Methods and systems for temperature control for a substrate" was invented by Paul Zachary Wirth (Kalispell, Mont.), Kiyki-Shiy Shang (Mountain House, Calif.) and Mikhail Taraboukhine (Pleasanton, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A direct current (DC) power is supplied to a heating element embedded into a substrate support assembly (SSA). A voltage across the heating element and a current through the heating element is measured as the DC power is supplied to the heating element. A resistance of the heating element is determined based on the mea...