US Patent Issued to Applied Materials on April 22 for "Closed loop faraday correction of a horizontal beam current profile for uniform current tuning" (Massachusetts Inventors)

ALEXANDRIA, Va., June 6 -- United States Patent no. 12,283,460, issued on April 22, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Closed loop faraday correction of a horizontal beam current profile for uniform current tuning" was invented by Tyler Wills (Marblehead, Mass.) and Richard Allen Sprenkle (South Hamilton, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A system and method for creating a beam current profile that eliminates variations that are not position dependent is disclosed. The system includes two Faraday sensors; one which is moved across the ion beam and a second that remains at or near a certain location. The reference Faraday sensor is used to measure temporal variat...