US Patent Issued to Applied Materials on April 15 for "Model-based controlled load lock pumping scheme" (Massachusetts, New Hampshire Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,124, issued on April 15, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Model-based controlled load lock pumping scheme" was invented by D. Jeffrey Lischer (Acton, Mass.), Bon-Woong Koo (Andover, Mass.), Dawei Sun (Lynnfield, Mass.), Chi-Yang Cheng (West Lebanon, N.H.), Paul Joseph Murphy (Reading, Mass.), Frank Sinclair (Boston), Gregory Edward Stratoti (Sandown, N.H.), Tseh-Jen Hsieh (Rowley, Mass.), Wayne Chen (Brookline, Mass.) and Guy Oteri (Merrimac, Mass.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A load lock in which the pumping speed is controlled so as to minimize the possibility of condensation is disclosed. The load lo...