US Patent Issued to Applied Materials on April 1 for "Autonomous substrate processing system" (California, Idaho Inventors)

ALEXANDRIA, Va., April 2 -- United States Patent no. 12,265,377, issued on April 1, was assigned to Applied Materials Inc. (Santa Clara, Calif.).

"Autonomous substrate processing system" was invented by Priyadarshi Panda (Newark, Calif.), Lei Lian (Fremont, Calif.), Pengyu Han (San Jose, Calif.), Todd J. Egan (Fremont, Calif.), Prashant Aji (San Jose, Calif.), Eli Mor (Garden City, Idaho), Alex J. Tom (San Francisco) and Leonard Michael Tedeschi (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cool cluster comprises one or more transfer chambers; a plurality of process chambers connected to the one or more transfer chambers; and a computing device of the tool cluster. The computing device i...