ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,889, issued on Nov. 25, was assigned to Applied Materials Israel Ltd. (Rehovot, Israel).
"Inspection recipe optimization for semiconductor specimens" was invented by Paz Yabbo (Gedera, Israel), Boaz Dudovich (Rehovot, Israel), Bhavna Ghai (Rehovot, Israel) and Amir Bar (Rehovot, Israel).
According to the abstract* released by the U.S. Patent & Trademark Office: "There is provided a system and method of optimizing an inspection recipe for inspecting a semiconductor specimen. The method includes obtaining test data from a test performed after inspection, the test data indicative of functional defectivity of the specimen with respect to at least one structural feature at a suspected...