US Patent Issued to Applied Materials Israel on Feb. 10 for "Coupling mirror of an optical inspection system" (Israeli Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,724, issued on Feb. 10, was assigned to Applied Materials Israel Ltd. (Rehovot, Israel).

"Coupling mirror of an optical inspection system" was invented by Mariano Abramson (Jerusalem), Uzi Barazani (Rehovot, Israel) and Menachem Lapid (Hashmonaim, Israel).

According to the abstract* released by the U.S. Patent & Trademark Office: "A wafer inspection tool comprising an illumination system having: a field of view (FOV); a light source pupil having a size and shape; a central optical axis; and one or more field angle defining a shape of said FOV extending away from said light source pupil; an objective lens arrangement including an objective and a plurality of interchangeable telesc...