ALEXANDRIA, Va., Dec. 2 -- United States Patent no. 12,487,273, issued on Dec. 2, was assigned to Applied Materials Israel Ltd. (Rehovot, Israel).
"Optimal determination of an overlay target" was invented by Tal Itzkovich (Tel-Aviv, Israel), Kevin Ryan Houchens (Rehovot, Israel), Nahum Bomshtein (Modi'in-Maccabim-Re'ut, Israel), Jenny Perry (Rehovot, Israel), Rahul Shenoy (Bangalore, India), Mohan Gopinathan (Bangalore, India), Jatin Balodhi (Bangalore, India) and Arjun Das Manaparambil (Bangalore, India).
According to the abstract* released by the U.S. Patent & Trademark Office: "There are provided systems and methods comprising obtaining design data of each of a plurality of given overlay targets comprising a plurality of stacked layers...