US Patent Issued to APPLIED MATERIALS ISRAEL on April 8 for "3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample" (Israeli Inventor)

ALEXANDRIA, Va., April 9 -- United States Patent no. 12,272,518, issued on April 8, was assigned to APPLIED MATERIALS ISRAEL LTD. (Rehovot, Israel).

"3D metrology from 3D datacube created from stack of registered images obtained during delayering of the sample" was invented by Ilya Blayvas (Jerusalem).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of evaluating a region of interest of a sample including: positioning the sample within in a vacuum chamber of an evaluation tool that includes a scanning electron microscope (SEM) column and a focused ion beam (FIB) column; acquiring a plurality of two-dimensional images of the region of interest by alternating a sequence of delayering the region of intere...