US Patent Issued to APPLIED MATERIALS ISRAEL on April 15 for "Hybrid scanning electron microscopy and acousto-optic based metrology" (Israeli Inventors)

ALEXANDRIA, Va., June 5 -- United States Patent no. 12,278,085, issued on April 15, was assigned to APPLIED MATERIALS ISRAEL LTD. (Rehovot, Israel).

"Hybrid scanning electron microscopy and acousto-optic based metrology" was invented by Guy Shwartz (Ramat-Gan, Israel), Ori Golani (Ramat Gan, Israel), Itamar Shani (Rehovot, Israel) and Ido Almog (Rehovot, Israel).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed herein is a method for non-destructive hybrid acousto-optic and scanning electron microscopy-based metrology. The method includes: (i) obtaining acousto-optic and scanning electron microscopy measurement data of an inspected structure on a sample; (ii) processing the measurement data to extract ...