ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,131, issued on July 15, was assigned to Applied Materials Israel Ltd (Rehovot, Israel) and TECHNISCHE UNIVERSITEIT DELFT (Delft, Netherlands).
"Method for inspecting a specimen and charged particle beam device" was invented by Pieter Kruit (Delft, Netherlands), Ron Naftali (Shoham, Israel), Jurgen Frosien (Riemerling, Germany), Ralf Schmid (Poing, Germany), Benjamin John Cook (Munich), Roman Barday (Poing, Germany) and Dieter Winkler (Poing, Germany).
According to the abstract* released by the U.S. Patent & Trademark Office: "A charged particle beam device for irradiating or inspecting a specimen is described. The charged particle beam device includes a charged particle beam sour...