US Patent Issued to Anhui China Science MW Electronic Technology on Jan. 28 for "Method for preparing a MEMS micro mirror with electrodes on both sides" (Chinese Inventors)

ALEXANDRIA, Va., Jan. 29 -- United States Patent no. 12,209,014, issued on Jan. 28, was assigned to Anhui China Science MW Electronic Technology Co. Ltd. (Bengbu, China).

"Method for preparing a MEMS micro mirror with electrodes on both sides" was invented by Wei Li (Bengbu, China) and Jing Xu (Bengbu, China).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a method for preparing a MEMS micro mirror with electrodes on both sides. The method includes: providing a first base, forming an electrode lead groove in the first base; forming an insulating groove, a plurality of lower comb plates and a moving space groove in a first device layer to obtain a bonded structure layer; providin...