US Patent Issued to AMOSENSE on May 20 for "Electrostatic chuck sheet and electrostatic chuck comprising same" (South Korean Inventors)

ALEXANDRIA, Va., June 16 -- United States Patent no. 12,308,274, issued on May 20, was assigned to AMOSENSE Co. LTD. (Cheonan-si, South Korea).

"Electrostatic chuck sheet and electrostatic chuck comprising same" was invented by Jihyung Lee (Cheonan-si, South Korea), Kyungwhan Woo (Cheonan-si, South Korea), Byoungsu Jin (Cheonan-si, South Korea), Sungbaek Dan (Cheonan-si, South Korea), Youngjun An (Cheonan-si, South Korea), Seunggon Park (Cheonan-si, South Korea) and Kihoon Nam (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is an electrostatic chuck sheet included in an electrostatic chuck for chucking a substrate by using electrostatic force. The electrostatic chuck sheet c...