US Patent Issued to AMOSENSE on Feb. 10 for "Electrostatic chuck, electrostatic chuck heater comprising same, and semiconductor holding device" (South Korean Inventor)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,545,630, issued on Feb. 10, was assigned to AMOSENSE Co. LTD. (Cheonan-si, South Korea).

"Electrostatic chuck, electrostatic chuck heater comprising same, and semiconductor holding device" was invented by Ji Hyung Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An electrostatic chuck is provided. Implemented according to an embodiment of the present invention is an electrostatic chuck comprising: a silicon nitride sintered body; a surface modification layer covering at least a portion of the external surface of the silicon nitride sintered body and having corrosion resistance and plasma resistance; and an electrostatic electr...