US Patent Issued to Akoustis on March 4 for "Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices" (North Carolina Inventor)

ALEXANDRIA, Va., March 5 -- United States Patent no. 12,244,289, issued on March 4, was assigned to Akoustis Inc. (Huntersville, N.C.).

"Method of manufacturing integrated circuit configured with two or more single crystal acoustic resonator devices" was invented by Jeffrey B. Shealy (Davidson, N.C.).

According to the abstract* released by the U.S. Patent & Trademark Office: "A method of fabricating a configurable single crystal acoustic resonator (SCAR) device integrated circuit. The method includes providing a bulk substrate structure having first and second recessed regions with a support member disposed in between. A thickness of single crystal piezo material is formed overlying the bulk substrate with an exposed backside region confi...