US Patent Issued to AIXTRON on July 15 for "Arrangement for measuring the surface temperature of a susceptor in a CVD reactor" (German Inventors)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,359,319, issued on July 15, was assigned to AIXTRON SE (Herzogenrath, Germany).

"Arrangement for measuring the surface temperature of a susceptor in a CVD reactor" was invented by Peter Sebald Lauffer (Aachen, Germany) and Francisco Ruda Y Witt (Eschweiler, Germany).

According to the abstract* released by the U.S. Patent & Trademark Office: "A cover plate, for a CVD reactor, has a circumferential edge extending on a circular arc line, or a plurality of identically configured cover plates can be arranged in a circle such that their respective outer edges extending along circular arcs complement each other to form a complete circle. Storage spaces for substrates or substrate holders su...