ALEXANDRIA, Va., Oct. 8 -- United States Patent no. 12,438,516, issued on Oct. 7, was assigned to Agency for Science, Technology and Research (Singapore).
"Resonator and method of forming the same" was invented by Sagnik Ghosh (Singapore), Eldwin Jiaqiang Ng (Singapore), Jaibir Sharma (Singapore) and Srinivas Merugu (Singapore).
According to the abstract* released by the U.S. Patent & Trademark Office: "Various embodiments may relate to a resonator. The resonator may include a support including a substrate portion, and a membrane portion extending from the substrate portion over a cavity. The resonator may also include a piezoelectric layer on the membrane portion. The resonator may further include an electrode on the piezoelectric layer....