ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,494,463, issued on Dec. 9, was assigned to Agency for Science, Technology and Research (Singapore).
"Chemical sensor and method of forming the same" was invented by Lennon Yao Ting Lee (Singapore).
According to the abstract* released by the U.S. Patent & Trademark Office: "A chemical sensor that includes a first semiconductor substrate. The chemical sensor may also include a second semiconductor substrate. The chemical sensor may further include one or more metal layers between the first semiconductor substrate and the second semiconductor substrate such that the first and second semiconductor substrates and the one or more metal layers form a cell including a cavity, the cavity havin...