US Patent Issued to Advanced Refurbishment Technologies on July 29 for "Compact remote plasma source for HDP CVD chambers" (Texas Inventor)

ALEXANDRIA, Va., July 30 -- United States Patent no. 12,374,529, issued on July 29, was assigned to Advanced Refurbishment Technologies LLC (Austin, Texas).

"Compact remote plasma source for HDP CVD chambers" was invented by Christopher William Lewis (Austin, Texas).

According to the abstract* released by the U.S. Patent & Trademark Office: "This disclosure relates to systems and apparatuses for the cleaning of HDP chambers, and more specifically, for remote plasma source ("RPS") systems used for the generation and delivery of cleaning radicals to the interior of such chambers for the purposes of reacting with and removing materials deposited therein during the chambers' normal operation, wherein the plasma source and the power supply of ...