ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,534,805, issued on Jan. 27, was assigned to ADVANCED MATERIALS TECHNOLOGY & ENGINEERING CO LTD. (Jiangsu, China).
"ALD processing apparatus and processing method" was invented by Jun Wan (Jiangsu, China), Haitao Liao (Jiangsu, China), Bin Wang (Jiangsu, China) and Hui Wang (Jiangsu, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are an ALD processing apparatus and a processing method. A reactor of the processing apparatus includes a vacuum chamber and a reaction chamber, the reaction chamber is built in the vacuum chamber and is open at a top, a bottom of the reaction chamber is formed with a gas inlet channel and a gas outlet channel arr...