ALEXANDRIA, Va., Sept. 3 -- United States Patent no. 12,406,838, issued on Sept. 2, was assigned to Advanced Energy Industries Inc. (Fort Collins, Colo.).
"Rate enhanced pulsed DC sputtering system" was invented by Douglas Pelleymounter (Grand Rapids, Minn.).
According to the abstract* released by the U.S. Patent & Trademark Office: "A sputtering system and method are disclosed. The system includes first power source coupled between a first and second power leads, and the first power source provides a first voltage that alternates between positive and negative during each of multiple cycles. The system also includes a second power source coupled between the second power lead and a third power lead, and the second power source provides a s...