ALEXANDRIA, Va., June 17 -- United States Patent no. 12,314,016, issued on May 27, was assigned to Advanced Energy Industries Inc. (Denver).
"Plasma processing control system with adaptive fuzzy controller" was invented by Chad S. Samuels (Fort Collins, Colo.).
According to the abstract* released by the U.S. Patent & Trademark Office: "Fuzzy control systems and methods are disclosed. A method includes receiving a reference signal defining target values for a parameter that is controlled at an output of the plasma processing system and obtaining a measure of the parameter that is controlled at the output. A fuzzy controller provides a control signal to adjust at least one actuator based at least upon the reference signal and the measure of...