ALEXANDRIA, Va., March 19 -- United States Patent no. 12,255,048, issued on March 18, was assigned to Advanced Energy Industries Inc. (Denver).
"Apparatus to control ion energy" was invented by Victor Brouk (Fort Collins, Colo.) and Randy Heckman (Fort Collins, Colo.).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus and method to produce a waveform. The apparatus includes a first node to couple to a substrate support and a power supply coupled to a second node wherein the power supply is configured to provide a DC voltage to set an ion-energy at a surface of the substrate. The apparatus also includes a first switch that couples the second node to the first node, and responsive to the first switch b...