US Patent Issued to Active Layer Parametrics on May 27 for "Methods and tools for electrical property depth profiling using electro-etching" (California Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,313,669, issued on May 27, was assigned to Active Layer Parametrics Inc. (Scotts Valley, Calif.).

"Methods and tools for electrical property depth profiling using electro-etching" was invented by Bulent Mehmet Basol (Manhattan Beach, Calif.) and Abhijeet Joshi (San Jose, Calif.).

According to the abstract* released by the U.S. Patent & Trademark Office: "In some embodiments, a method includes forming a mini chamber over a test region, the mini chamber comprising an inlet, an outlet and an electrode, introducing an electrolyte solution into the mini chamber through the inlet, applying an electro-etching potential difference between the electrode and at least one contact region and red...