ALEXANDRIA, Va., Jan. 20 -- United States Patent no. 12,532,129, issued on Jan. 20, was assigned to AAC Technologies Pte. Ltd. (Singapore).
"Acoustic sensor and manufacturing method therefor" was invented by Chungmin Li (Taiwan, China), KianHeng Goh (Batu Pahat, Malaysia), Qiang Dan (Shenzhen, China) and Kahkeen Lai (Singapore).
According to the abstract* released by the U.S. Patent & Trademark Office: "Acoustic sensor and manufacturing method. The acoustic sensor includes: a base including a first silicon layer, a first oxide layer and a second silicon layer stacked, and a back cavity; a second oxide layer formed on the base; a piezoelectric unit formed on the second oxide layer and including a first electrode layer, a piezoelectric laye...