ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,526,584, issued on Jan. 13, was assigned to AAC Kaital Technologies (Wuhan) Co. LTD (Wuhan, China).
"MEMS speaker" was invented by Yiwei Zhou (Wuhan, China), Yu Shen (Wuhan, China), Qiang Dan (Wuhan, China) and Yang Li (Wuhan, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "A Micro-Electro-Mechanical System (MEMS) speaker is provided including only a substrate enclosing a cavity, a piezoelectric diaphragm disposed above the substrate and covering the cavity, and a flexible structure layer covering the piezoelectric diaphragm. Both the piezoelectric diaphragm and the flexible structure layer are complete sheet structures, a young modulus of the flex...