ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,477,278, issued on Nov. 18, was assigned to AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) Co. LTD. (Shenzhen, China).
"MEMS microphone" was invented by Zhuanzhuan Zhao (Shenzhen, China), Kaijie Wang (Shenzhen, China) and Rui Zhang (Shenzhen, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "An MEMS microphone includes a substrate with a back cavity and a capacitor system arranged on the substrate. The capacitor system includes a back plate and a diaphragm opposite to and spaced apart from the back plate. Surface of the back plate facing diaphragm or surface of diaphragm facing the back plate being provided with an anti-adhesion member. When the diaphragm move...