ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,513,468, issued on Dec. 30, was assigned to AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) Co. LTD. (Shenzhen, China).
"MEMS microphone chip" was invented by Zhuanzhuan Zhao (Shenzhen, China) and Rui Zhang (Shenzhen, China).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure discloses a MEMS microphone chip having a substrate with a back cavity, a back plate fixed to the substrate, and a diaphragm unit opposite to the back plate. The diaphragm unit includes a first diaphragm spaced apart from the back plate, a support member fixed on a side of the first diaphragm away from the back cavity, and a second diaphragm spaced apart from the first diaphr...